o Electromigration (EM): The gradual displacement and migration of metal atoms in an interconnect (wire or via) caused by the momentum transfer from flowing electrons. Over time, at high current densities and temperatures, this movement can lead to:
Voids: Depletion of metal atoms in a region, increasing resistance and potentially causing an open circuit (wire break).
Hillocks: Accumulation of metal atoms in another region, potentially causing shorts to adjacent wires.
